|
1 |
Process
|
VRBT DRIVE & CABLE ASS'Y |
40-00100-00 |
|
2 |
Process
|
MEGAPAC POWER SUPPLY MP7-4 |
MP7-4 |
|
3 |
Process
|
INSTRUMENT PANEL |
User Option |
|
4 |
Process
|
REMOTE AC |
02-00074-00 / 02-00160-00 |
|
5 |
Process
|
MAIN AC BOX |
02-00019-01 / 02-00279-00/01 |
|
6 |
Process
|
TERMINAL PANEL(150MM CLASSIC) |
02-00072-00 |
|
7 |
Process
|
TERMINAL PANEL(150MM, 200MM) |
02-032615-00 |
|
8 |
Process
|
VALVE, SPRINGLESS DIA, NC, FEM, 1/8 VCR |
DP6V 1/8" EP Auto Diaphragm |
|
9 |
Process
|
FIILTER TEOS LIQUID APP, 0.5 MICRON |
SS-2FWS-05-4986 |
|
10 |
Process
|
RETROKIT C1W LL ONE PEACE DOOR ASSY |
05-306158-10 |
|
11 |
Process
|
CYLINDER, PNEUMATIC, CASS DOOR |
60-00012-00 |
|
12 |
Process
|
CYLINDER, PNEUMATIC, CASS DOOR |
60-00012-20 |
|
13 |
Process
|
PLATE, TOP- 150MM |
15-00003-10 |
|
14 |
Process
|
PLATE, TOP- 200MM |
15-00601-00 |
|
15 |
Process
|
PLATE, TOP - WCVD |
15-01076-00 |
|
16 |
Process
|
SHOWER HEAD 150MM |
16-033932-00 |
|
17 |
Process
|
SHOWER HEAD 200MM |
16-033931-00 |
|
18 |
Process
|
SHOWER HEAD - WCVD 150MM |
03-00255-00 |
|
19 |
Process
|
SHOWER HEAD - WCVD 200MM |
03-00258-00 |
|
20 |
Process
|
GAS MIXING BOX ASSY - 150MM |
03-00010-00 |
|
21 |
Process
|
GAS MIXING BOX ASSY - 200MM |
02-00130-00 |
|
22 |
Process
|
RING CHAMBER WALL - 150MM |
15-00566-00 |
|
23 |
Process
|
RING CHAMBER WALL - 200MM |
15-00603-00 |
|
24 |
Process
|
RING CHAMBER WALL - WCVD |
02-00242-00 |
|
25 |
Process
|
RF SHUNT ASS'Y |
02-00167-00 |
|
26 |
Process
|
HEATER ISO FILTER ASS'Y - CLASSIC |
02-00080-00 |
|
27 |
Process
|
HEATER ISO FILTER ASS'Y - 150MM, 200MM |
02-00399-00 |
|
28 |
Process
|
PCB TC FILTER |
27-00123-00 |
|
29 |
Process
|
FEEDTHRU ASS'Y ELECTRICAL |
19-00056-00 |
|
30 |
Process
|
RF FEEDTHRU CERAMIC INNER SEATH ASSY |
02-111903-10 |
|
31 |
Process
|
BOTTOM PLATE ASSY - 150MM |
15-00477-00 |
|
32 |
Process
|
BOTTOM PLATE ASSY - 200MM |
15-00619-00 |
|
33 |
Process
|
BOTTOM PLATE ASSY - WCVD |
02-10459-01 |
|
34 |
Process
|
LIFT PIN, 4.47" |
15-00834-00 |
|
35 |
Process
|
LIFT PIN, LOAD STATION, 4.74" |
15-00975-00 |
|
36 |
Process
|
PEDESTALS - 150MM, C, STA.1 |
02-09268-00 |
|
37 |
Process
|
PEDESTALS - 150MM, C, STA.2-5 |
02-09269-00 |
|
38 |
Process
|
PEDESTALS - 150MM MOER, C, STA.1 |
02-033494-00 |
|
39 |
Process
|
PEDESTALS - 150MM MOER, C, STA.2-5 |
02-033493-00 |
|
40 |
Process
|
THERMOCOUPLE ASS'Y, SPRINGLOADED |
03-00216-00 |
|
41 |
Process
|
PLATE, MTG, PED, STYLE C, STA. 2-5 |
16-033371-00 |
|
42 |
Process
|
PLATE, MTG, PED, STYLE C, STA. 1 |
16-033372-00 |
|
43 |
Process
|
SPRING, CERAMIC |
15-00866-00 |
|
44 |
Process
|
PEDESTALS - 200MM, D, NO FLAT |
02-033394-00 |
|
45 |
Process
|
PEDESTALS - 200MM, D, W/FLAT |
02-033920-00 |
|
46 |
Process
|
PEDESTALS - 200MM MOER, D, W/FLAT |
02-033395-00 |
|
47 |
Process
|
PEDESTALS - 200MM MOER, D, NO FLAT |
02-033134-00 |
|
48 |
Process
|
PLATE, MTG, PED, STYLE D, STA. 2-5 |
16-032558-00 |
|
49 |
Process
|
PLATE, MTG, PED, STYLE D, STA. 1 |
16-032609-00 |
|
50 |
Process
|
PLATE, RING LIFT, EXCL OPT 150MM |
15-00931-00 |
|
51 |
Process
|
PLATE, RING LIFT, EXCL OPT 200MM |
15-10628-00 |
|
52 |
Process
|
INDEXER, WAFER EXCL 150MM |
15-00934-01 |
|
53 |
Process
|
INDEXER, WAFER EXCL 200MM |
15-00934-02 |
|
54 |
Process
|
PNEUMATIC PANEL ASSY - CLASSIC |
02-00012-00 |
|
55 |
Process
|
PNEUMATIC PANEL ASSY |
02-00094-00 |
|
56 |
Process
|
CASSETTE DOOR SAFETY LIP SENSOR (TAPE SWITCH) |
34-00097-00 |
|
57 |
Process
|
BOARD ASSY SENSE PIN BREAKOUT |
02-00330-10 |
|
58 |
Process
|
HARNESS ASS'Y, SENSOR, 26.5" |
02-00397-00 |
|
59 |
Process
|
HARNESS ASS'Y, SENSOR, 12.0" |
02-00402-02 |
|
60 |
Process
|
HARNESS ASS'Y, SENSOR,17.5 |
02-00402-03 |
|
61 |
Process
|
HARNESS ASS'Y, SENSOR, 26.5" |
00-00397-00 |
|
62 |
Process
|
SENSOR PIN BOARD (REV.01) |
02-00315-00-REV01 |
|
63 |
Process
|
CONVECTRON GAUGE 1/4 INCH VCR FLANGE |
60-00055-00 |
|
64 |
Process
|
BACKFILL DIFFUSER FILTER - REPLACEMENT PART (NEW) |
60-00033-0 |
|
65 |
Process
|
HOLDER, LL BACKFILL FILTER |
15-00216-01 |
|
66 |
Process
|
COOLING PLATE DUAL |
15-01108-00 |
|
67 |
Process
|
CYLINDER, PNEUMATIC, LL DOOR |
60-00176-00 |
|
68 |
Process
|
CLEVIS, PISTON ROD, 4" STROKE |
20-00407-00 |
|
69 |
Process
|
FEED THRU 3/8" O-SEAL ULTRA TORR |
15-00685-00 |
|
70 |
Process
|
WASHER FEED TURU 1/2" ID ALUM |
15-00686-00 |
|
71 |
Process
|
NUT HEX 1/2-20" ID, ALUM |
15-00229-00 |
|
72 |
Process
|
BLOCK TWIN PILLOW |
20-00020-01 |
|
73 |
Process
|
VALVE GATE HI VAC 24VDC |
V20-D100-NTS / 60-00003-10 |
|
74 |
Process
|
VALVE HI VAC 2 NW50 (KF50) |
3001141-NTS / 19-00249-10 |
|
75 |
Process
|
VALVE THROTTLE VACUUM CONTROL |
IVC-3100-NTS / 60-00001-10 |
|
76 |
Process
|
CONTROLLER PRESS THROTTLE VALVE -REACTOR |
IVT-300-NTS / 27-00009-10 |
|
77 |
Process
|
PLATFORM - 150MM |
02-00403-00 |
|
78 |
Process
|
PLATFORM - 200MM |
02-00395-00 |
|
79 |
Process
|
INDUCTOR ASSY 150µH |
03-00306-00 |
|
80 |
Process
|
CAPACITOR ASSY WITH JUMPER |
02-00105-11 |
|
81 |
Process
|
PLATE, RF DIST, COPPER(150MM) |
15-01022-00 |
|
82 |
Process
|
PLATE, RF DIST, COPPER(200MM) |
15-01023-00 |
|
83 |
Process
|
PLATE RF DIST INSULATION |
15-01023-10 |
|
84 |
Process
|
ASSY NOZZLE RF STRAP |
15-00602-10 |
|
85 |
Process
|
RF DISTRIBUTION ASSY |
03-00138-00 |
|
86 |
Process
|
POST DISTRIB TUNER |
02-00176-20 |
|
87 |
Process
|
BRACKET PILLOW BLOCK 150MM |
16-00145-00 |
|
88 |
Process
|
BRACKET PILLOW BLOCK 200MM |
16-00164-00 |
|
89 |
Process
|
SHAFT 1.5" DIA LIFT (MOD) |
19-00028-00 |
|
90 |
Process
|
LIFT ACTUATOR MECHNISM |
27-00101-00 |
|
91 |
Process
|
VIEW PORT SAPPHIRE WINDOW FOR NOVELLUS |
15-110411-00 |
|
92 |
Process
|
STRAP, HEATER GROUND, ALUM |
15-00126-00 |
|
93 |
Process
|
GROUND STRAP |
17-103987-00 |
|
94 |
Process
|
WIRE INSULATED CERAMIC LONG |
16-00098-00 |
|
95 |
Process
|
WIRE INSULATED CERAMIC BEAD SHORT |
16-00092-00 |
|
96 |
Process
|
THERMOCOUPLE TYPE E 1/16 |
27-00127-00 |
|
97 |
Process
|
THERMOCOUPLE TYPE J 1/8 |
27-00010-01 |
|
98 |
Process
|
THERMOCOUPLE TYPE J 1/16 |
27-00079-00 |
|
99 |
Process
|
JUNCTION BOX |
03-00207-00 |
|
100 |
Process
|
VALVE,DIA,NC,1/4VCR-F,AIR OPR |
2-00612-00 |
|
101 |
Process
|
LL PURGE MICRO NIDDLE VALVE |
10-00186-10 |
|
102 |
Process
|
CDA SENSOR |
60-00101-10 |
|
103 |
Process
|
PCW FLOW SENSOR |
03-00238-10 |
|
104 |
Process
|
FLOW S/W FITTING |
SCF-6-6R |
|
105 |
Robot
|
OPTICAL PADDLE 150MM |
15-01111-00 |
|
106 |
Robot
|
BRACKET PADDLE 150MM(MODIFIED) |
15-00485-10 |
|
107 |
Robot
|
BRACKET PADDLE 150MM(SPECIAL) |
15-00485-20 |
|
108 |
Robot
|
OPTICAL PADDLE 200MM |
15-01127-00 |
|
109 |
Robot
|
BRACKET PADDLE 200MM |
15-01063-00 |
|
110 |
Robot
|
ARM KIT ASSY WITHOUT PADDLE UPPER |
02-00269-00 |
|
111 |
Robot
|
C1 ONE ARM ROBOT - ORIGINAL MOTOR |
02-00093-00 |
|
112 |
Robot
|
C1 ONE ARM ROBOT (REV.01) - PDC 8000용 |
02-00093-01 |
|
113 |
Spindle
|
LOWER SPINDLE ASS'Y - 150MM |
02-00064-00 |
|
114 |
Spindle
|
LOWER SPINDLE ASS'Y - 200MM |
02-00127-00 |
|
115 |
Spindle
|
LOWER SPINDLE ASS'Y - WCVD |
02-00308-XX |
|
116 |
Spindle
|
PLATE, FORK RETAINER, TOP, 150MM |
15-00703-00 |
|
117 |
Spindle
|
PLATE, FORK RETAINER, TOP, 200MM |
15-00702-00 |
|
118 |
Spindle
|
FORK TOP PLATE A ANTIDEFLECT SEQUEL |
15-101482-00 |
|
119 |
Spindle
|
FORK TOP PLATE B ANTIDEFLECT |
15-101482-01 |
|
120 |
Spindle
|
PLATE, FORK RETAINER, BOTTOM, 150MM |
15-00701-00 |
|
121 |
Spindle
|
PLATE, FORK RETAINER, BOTTOM, 200MM |
15-00700-00 |
|
122 |
Spindle
|
SPRING, FORK |
17-00148-00 |
|
123 |
Spindle
|
RETAINER FORK SEQUEL |
17-101596-00 |
|
124 |
Spindle
|
CLAMP, ROTATION ADJUSTMENT |
15-00654-00 |
|
125 |
Spindle
|
CLAMP. FLAT |
15-00729-00 |
|
126 |
Spindle
|
CLAMP, SPINDLE HUB MOUNT |
15-00653-00 |
|
127 |
Spindle
|
HUB, UPPER INDEXER |
15-034847-00 |
|
128 |
Spindle
|
HUB, LOWER INDEXER |
15-034848-00 |
|
129 |
Spindle
|
HUB, INDEXER |
15-01101-00 |
|
130 |
Spindle
|
PIN LIFT MECHANISMS |
02-00470-01/02/03 |